11000 Series Pneumatic with Copper Bonnet Seal



Standard Technical Specifications




Viton Bonnet / Viton Gate Seals

UHV: Copper / Viton® elastomer




Bakeout Temperature

Metal sealed bonnet


- Valve open: 200°C


- Valve closed: 150°C


Actuator


- Manual: 60°C


- Pneumatic: 60°C




Mounting Position

Any




Cycles Until Service

100,000 Cycles






Vacuum

Pressure Range


- UHV: 1x10-10 mbar


Helium leak rate: < 2x10-9 mbar l/s


Differential pressure closed: 1 bar in either direction


Maximum Δ pressure before opening: < 30 mbar




Mechanism

Pneumatic air service: 80 psig


Solenoid: 4.0 Watts


- supplied voltage: 120V AC, 50/60 Hz


- optional voltages: 24, 200, 240 VAC 50/60 Hz or 12, 24V DC


Position indicator, max: 115 VAC or 28 VDC, 20 mA




Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote. If you need help finding a model number use the following the link: 11000 Series Model Key Guide

DN Model Number CF-F
0 or 4 (Conflat)
mm inch
16 0.625 11222-006_ 2D 3D Quote
40 1.50 11222-015_R 2D 3D Quote
50 2.00 11222-020_R 2D 3D Quote
63 2.50 11222-025_R 2D 3D Quote
80 3.00 11222-030_R 2D 3D Quote
100 4.00 11222-040_R 2D 3D Quote
160 6.00 11222-060_R 2D 3D Quote
200 8.00 11222-080_R 2D 3D Quote
250 10.00 11222-100_R 2D 3D Quote
320 12.00 11222-120_R 2D 3D Quote
350 14.00 11222-140_R 2D 3D Quote

Flange Types

  • 0 = CF-F Port with UNF Thread (11222-0400R)
  • 4 = CF-F Port with Metric Thread (11222-0404R)

Options

  • Custom flanges
  • Alternate o-ring material
  • Alternate solenoid voltages
  • Microswitches for position indicators
  • Roughing ports
  • High temperature components including o-rings, microswitches and actuator
  • Larger Sizes