Standard Technical Specifications
Viton Bonnet / Viton Gate Seals
UHV: Copper / Viton® elastomer
Bakeout Temperature
Metal sealed bonnet
- Valve open: 200°C
- Valve closed: 150°C
Actuator
- Manual: 60°C
- Pneumatic: 60°C
Mounting Position
Any
Cycles Until Service
100,000 Cycles
Vacuum
Pressure Range
- UHV: 1x10-10 mbar
Helium leak rate: < 2x10-9 mbar l/s
Differential pressure closed: 1 bar in either direction
Maximum Δ pressure before opening: < 30 mbar
Mechanism
Pneumatic air service: 80 psig
Solenoid: 4.0 Watts
- supplied voltage: 120V AC, 50/60 Hz
- optional voltages: 24, 200, 240 VAC 50/60 Hz or 12, 24V DC
Position indicator, max: 115 VAC or 28 VDC, 20 mA
Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote. If you need help finding a model number use the following the link: 11000 Series Model Key Guide
DN | Model Number | CF-F 0 or 4 (Conflat) | |||
---|---|---|---|---|---|
mm | inch | ||||
16 | 0.625 | 11222-006_ | 2D | 3D | Quote |
40 | 1.50 | 11222-015_R | 2D | 3D | Quote |
50 | 2.00 | 11222-020_R | 2D | 3D | Quote |
63 | 2.50 | 11222-025_R | 2D | 3D | Quote |
80 | 3.00 | 11222-030_R | 2D | 3D | Quote |
100 | 4.00 | 11222-040_R | 2D | 3D | Quote |
160 | 6.00 | 11222-060_R | 2D | 3D | Quote |
200 | 8.00 | 11222-080_R | 2D | 3D | Quote |
250 | 10.00 | 11222-100_R | 2D | 3D | Quote |
320 | 12.00 | 11222-120_R | 2D | 3D | Quote |
350 | 14.00 | 11222-140_R | 2D | 3D | Quote |
Flange Types
- 0 = CF-F Port with UNF Thread (11222-0400R)
- 4 = CF-F Port with Metric Thread (11222-0404R)
Options
- Custom flanges
- Alternate o-ring material
- Alternate solenoid voltages
- Microswitches for position indicators
- Roughing ports
- High temperature components including o-rings, microswitches and actuator
- Larger Sizes