Description
The 81000 Series Aluminum Gate Valves are designed for high vacuum applications specifically when pressure ranges approximate 1 x 10-7 mbar and bakeout temperatures do not exceed 150°C. These valves are designed for system integrators, designers and OEM’s within the Semiconductor, Solar, LED/FPD, Coating and BioPharm industries due to their robust design and low cost. They feature precision machined high strength aluminum bodies from solid 6061-T6 billet, dual quad ring long life shaft seals and high performance PEEK components.
Standard Technical Specifications
Materials
Valve body and gate: 6061-T6 aluminium
Shaft: [DN40-80 AL/[DN100-500]304SS]
Carriage: 6061-T6 Aluminium/PEEK
Bonnet/gate/shaft seals: Viton® elastomer
Bakeout Temperature
without solenoid
Valve Body and Gate: 120°C
Actuator: 80°C
Vacuum
Pressure Range
HV: 1x10-9 mbar
Helium leak rate: <2x10-9 mbar l/s
Differential pressure closed: 1 bar in either direction
Maximum Δ pressure before opening: ≤30 mbar
Mounting Position
Any
Vacuum
Pressure Range: 1x10-7 mbar
Helium leak rate: < 2x10-9 mbar l/s
Differential pressure: ≤ 1.6 bar in either direction
Differential pressure at opening: ≤30 mbar
Mechanism
Manual: hand crank
Pneumatic air service: 80 psig
Solenoid: 4.0 Watts
- supplied voltage: 120V AC, 50/60 Hz
- optional voltages: 24, 200, 240 VAC, 50/60 Hz or 12.24V DC
Position indicator, max: 115 VAC or 28 VDC, 20mA
Cycles Until Service
[DN40-160]: 400,000 cycles
[DN200-320]: 250000 cycles
Options
Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote.
If you need help finding a model number use the following link: 81000 Series Model Key Guide
Pneumatic with Elastomer Bonnet and Gate O-Ring (includes reed switch position indicators)
Pneumatic – Viton Seals without Solenoid and Position Indicator
DN | Model Number | KF/ISO-F 3 (Bolted) | ISO-K 6 (Clamped) | CF-F* 0 or 4 (Conflat) | |||||||
---|---|---|---|---|---|---|---|---|---|---|---|
mm | inch | ||||||||||
40 | 1.50 | 81210-015_R | 2D | 3D | Quote | – | – | – | 2D | 3D | Quote |
50 | 2.00 | 81210-020_R | 2D | 3D | Quote | – | – | – | 2D | 3D | Quote |
63 | 2.50 | 81210-025_R | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
80 | 3.00 | 81210-030_R | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
100 | 4.00 | 81210-040_R | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
160 | 6.00 | 81210-060_R | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
200 | 8.00 | 81210-080_R | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
250 | 10.00 | 81210-100_R | 2D | 3D | Quote | – | – | – | 2D | 3D | Quote |
320 | 12.00 | 81210-120_R | 2D | 3D | Quote | – | – | – | 2D | 3D | Quote |
Flange Types
- 0 = CF-F Port with UNF Thread (81210-0400)
- 3 = KF/ISO-F Bolted (81210-0403)
- 4 = CF-F Port with UNF Thread (81210-0404)
- 6 = ISO-K Clamped (81210-0406)
Manual with Elastomer Bonnet and Gate O-Rings (no position indicators)
DN | Model Number | KF/ISO-F 3 (Bolted) | ISO-K 6 (Clamped) | CF-F* 0 or 4 (Conflat) | |||||||
---|---|---|---|---|---|---|---|---|---|---|---|
mm | inch | ||||||||||
40 | 1.50 | 81110-015_ | 2D | 3D | Quote | – | – | – | 2D | 3D | Quote |
50 | 2.00 | 81110-020_ | 2D | 3D | Quote | – | – | – | 2D | 3D | Quote |
63 | 2.50 | 81110-025_ | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
80 | 3.00 | 81110-030_ | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
100 | 4.00 | 81110-040_ | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
160 | 6.00 | 81110-060_ | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
200 | 8.00 | 81110-080_ | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
Flange Types
- 0 = CF-F Port with UNF Thread (81110-0400)
- 3 = KF/ISO-F Bolted (81110-0403)
- 4 = CF-F Port with UNF Thread (81110-0404)
- 6 = ISO-K Clamped (81110-0406)