13000 Series Stainless Steel Laminar Flow Gate Valves

Description

The HVA 13000 Series Laminar Flow Gate Valve features a laminar flow port orifice that effectively seals the valve mechanism from the gas stream. For additional protection, purge ports are installed in both the upper and lower body areas to allow an insert gas flow to prevent intrusion of the process gas into these areas. Extensive semiconductor applications have proven these valves to be a valuable asset in process systems. Laminar flow valves may be used in etching, CVD and any other process that uses highly corrosive gases which may be damaging to other valves.


Laminar-Flow-for-Processes-Requiring-CVD

Standard Technical Specifications




Materials

Valve body and gate: 304 stainless steel


Welded bellows shaft seal: AM-350




Vacuum

Pressure Range


HV: 1x10-9 mbar


Helium leak rate: <2x10-9 mbar l/s


Differential pressure closed: 1 bar in either direction


Maximum Δ pressure before opening: ≤30 mbar




Mechanism

Manual: hand crank


Pneumatic air service: 80 psig


Solenoid: 4.0 Watts


- supplied voltage: 120V AC, 50/60 Hz


Position indicator, max: 115 VAC or 28 VDC, 20 mA




Cycles Until Service

100,000 cycles


dependent on process






Bonnet/gate seals

HV: Viton® elastomer




Bakeout Temperature

- Standard: 150°C


- Optional: 250°C


Actuator


- Pneumatic: 60°C




Mounting Position

Any




Purge Port Fittings

Standard: 1/4-inch female VCR


Optional: Swagelock, NW16 KF, Custom




Laminar-Flow-Valve-Internals

Laminar-Flow-Valve-Diagram

Options

Custom flange sizes, Alternate voltage controls, Gauge ports, Microswitches, Million cycle option, QuickClamp Bonnet, Roughing ports, High-temp components