13000 Series Stainless Steel Laminar Flow Gate Valves


The HVA 13000 Series Laminar Flow Gate Valve features a laminar flow port orifice that effectively seals the valve mechanism from the gas stream. For additional protection, purge ports are installed in both the upper and lower body areas to allow an insert gas flow to prevent intrusion of the process gas into these areas. Extensive semiconductor applications have proven these valves to be a valuable asset in process systems. Laminar flow valves may be used in etching, CVD and any other process that uses highly corrosive gases which may be damaging to other valves.


Standard Technical Specifications


Valve body and gate: 304 stainless steel

Welded bellows shaft seal: AM-350


Pressure Range

HV: 1x10-9 mbar

Helium leak rate: <2x10-9 mbar l/s

Differential pressure closed: 1 bar in either direction

Maximum Δ pressure before opening: ≤30 mbar


Manual: hand crank

Pneumatic air service: 80 psig

Solenoid: 4.0 Watts

- supplied voltage: 120V AC, 50/60 Hz

Position indicator, max: 115 VAC or 28 VDC, 20 mA

Cycles Until Service

100,000 cycles

dependent on process

Bonnet/gate seals

HV: Viton® elastomer

Bakeout Temperature

- Standard: 150°C

- Optional: 250°C


- Pneumatic: 60°C

Mounting Position


Purge Port Fittings

Standard: 1/4-inch female VCR

Optional: Swagelock, NW16 KF, Custom




Custom flange sizes, Alternate voltage controls, Gauge ports, Microswitches, Million cycle option, QuickClamp Bonnet, Roughing ports, High-temp components