Description
The HVA 13000 Series Laminar Flow Gate Valve features a laminar flow port orifice that effectively seals the valve mechanism from the gas stream. For additional protection, purge ports are installed in both the upper and lower body areas to allow an insert gas flow to prevent intrusion of the process gas into these areas. Extensive semiconductor applications have proven these valves to be a valuable asset in process systems. Laminar flow valves may be used in etching, CVD and any other process that uses highly corrosive gases which may be damaging to other valves.
Standard Technical Specifications
Materials
Valve body and gate: 304 stainless steel
Welded bellows shaft seal: AM-350
Vacuum
Pressure Range
HV: 1x10-9 mbar
Helium leak rate: <2x10-9 mbar l/s
Differential pressure closed: 1 bar in either direction
Maximum Δ pressure before opening: ≤30 mbar
Mechanism
Manual: hand crank
Pneumatic air service: 80 psig
Solenoid: 4.0 Watts
- supplied voltage: 120V AC, 50/60 Hz
Position indicator, max: 115 VAC or 28 VDC, 20 mA
Cycles Until Service
100,000 cycles
dependent on process
Bonnet/gate seals
HV: Viton® elastomer
Bakeout Temperature
- Standard: 150°C
- Optional: 250°C
Actuator
- Pneumatic: 60°C
Mounting Position
Any
Purge Port Fittings
Standard: 1/4-inch female VCR
Optional: Swagelock, NW16 KF, Custom
Options
Custom flange sizes, Alternate voltage controls, Gauge ports, Microswitches, Million cycle option, QuickClamp Bonnet, Roughing ports, High-temp components