Description
The KF, ISO-F, ISO-K, ASA and JIS flanged 11000 Series Standard Cycle Gate Valves are designed for high vacuum applications. These valves provide valving for cryopumps, turbo pumps, ion pumps and other applications requiring clean, low outgassing valves. Metal-sealed CF flanges provide compatibility with UHV systems when pressure ranges approximate 1 x 10-10 mbar and higher bakeout temperatures of 200°C are needed. These valves can also be configured for higher temperatures.
Standard Technical Specifications
Materials
Valve body and gate: 304 stainless steel
Welded bellows shaft seal: AM-350
Vacuum
Pressure Range:
- HV: 1×10-9 mbar
- UHV: 1×10-10 mbar
Helium leak rate: <2×10-9 mbar I/s
Differential pressure closed: 1 bar in either direction
Maximum Δ pressure before opening: <30 mbar
Mechanism
Manual: hand crank
Pneumatic air service: 80 psig
Solenoid :
- supplied voltage: 120V AC, 50/60 Hz
- optional voltages: 24, 200, 240 VAC 50/60 Hz or 12, 24V DC
Position indicator, max: 115 VAC or 28 VDC, 20 mA
Bonnet / gate seals
HV: Viton® elastomer
UHV: Copper / Viton® elastomer
Bakeout Temperature
without solenoid
Elastomer sealed bonnet: 150°C
Metal sealed bonnet:
- Value open: 200°C
- Value closed: 150°C
Actuator:
- Manual: 60°C
- Pneumatic: 60°C
Mounting Position
Any
Cycles Until Service
100,000 Cycles dependent on process
