Description
The 71000 Series HPV (Harsh Process Valves) are designed for the harshest of vacuum environments. In typical harsh applications like MOCVD, ALD, PECVD the valves are subject to aggressive chemicals and high temperatures. The byproducts can affect the operation of the wheels/bearings, linkages and can cause the valve to seize so our HPV addresses this issue with no moving parts and a bellows that stays isolated from the process. The valves feature a robust dual containment design for increased safety, sealed bellows isolated from process for less maintenance, easy in-situ cleaning and o-ring replacement for reduced downtime and an optional integrated soft pump feature for lower particles.
Extreme Durability – For your most demanding process applications
Increased Safety – Robust dual containment design
Maintenance Free – Sealed bellows isolated from process
Reduced Downtime – Easy in-situ cleaning and o-ring replacement
Improved Pump Performance – Pump overload protection/isolation
Lower Particles – Intergrated soft pump feature
Standard Technical Specifications
Materials
Valve body and gate: 304 stainless steel
Welded bellows shaft seal: AM-350
Bonnet / gate seals: FKM or FKKM/FFPM elastometer
Temperature
Body: 150°C
Actuator: 100°C
Mounting Position
Any
Cycles
Cycles until service: > 250,000 cycles
dependent on process
Vacuum
Pressure Range: 1×10-9 mbar
Helium leak rate: < 1x10-9 mbar l/s
Differential pressure closed: tested up to 7 bar in any direction
Differential pressure at opening: 1 bar
Mechanism
Manual: hand crank
Pneumatic air service: 55-80 psi
Solenoid: 120V AC, 24V DC 50/60 Hz
Position indicator, max: 115VAC or 28 VDC, 20mA
Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote.
If you need help finding a model number use the following link: 71000 Series Model Key Guide
Pneumatic with Elastomer Bonnet and Gate O-Ring(includes reed switch position indicator)
DN | Model Number | KF/ISO-F 3 (Bolted) | ISO-K 6 (Clamped) | CF-F* 0 or 4 (Conflat) | |||||||
---|---|---|---|---|---|---|---|---|---|---|---|
mm | inch | ||||||||||
50 | 2.00 | 71210-020_R | 2D | 3D | Quote | – | – | – | 2D | 3D | Quote |
63 | 2.50 | 71210-025_R | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
80 | 3.00 | 71210-030_R | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
100 | 4.00 | 71210-040_R | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
160 | 6.00 | 71210-060_R | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
Flange Types
- 0 = CF-F Port with UNF Thread (71210-0400R)
- 3 = KF/ISO-F Bolted (71210-0403R)
- 4 = CF-F Port with Metric thread (71210-0404R)
- 6 = ISO-K Clamped (71210-0406R)
Manual with Elastomer Bonnet and Gate O-Rings(includes visual position indicator)
DN | Model Number | KF/ISO-F 3 (Bolted) | ISO-K 6 (Clamped) | CF-F* 0 or 4 (Conflat) | |||||||
---|---|---|---|---|---|---|---|---|---|---|---|
mm | inch | ||||||||||
50 | 2.00 | 71110-020_V | 2D | 3D | Quote | – | – | – | 2D | 3D | Quote |
63 | 2.50 | 71110-025_V | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
80 | 3.00 | 71110-030_V | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
100 | 4.00 | 71110-040_V | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
160 | 6.00 | 71110-060_V | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote |
Flange Types
- 0 = CF-F Port with UNF Thread (71210-0400R)
- 3 = KF/ISO-F Bolted (71210-0403R)
- 4 = CF-F Port with Metric thread (71210-0404R)
- 6 = ISO-K Clamped (71210-0406R)