88200 / 28200 Series Rectangular / Slit Valve

88200 Series Description

The 88200 Series Direct Drive Rectangular Valves offer one of the smallest interior surface areas in the vacuum valve industry. In the open position, the seal plate O-ring is completely out of sight preventing any particulate or media flow to accumulate on the sealing surface. In the closed position the one piece solid block design prevents any material buildup on the back side of the valve mechanism dramatically reducing service and maintenance requirements. This valve is engineered to meet the mechanical interface and vacuum containment requirements of the industry. To meet the specific needs of modular integrated processing systems, the valves are designed to isolate vacuum pressure on either side of the gate. A narrow profile design, including both actuator and controller, allows tight mounting between central, load-lock, handling and process chambers.


Standard Technical Specifications




Materials

Valve body and gate: 6061-T6 ALuminium


Welded bellows shaft seal: AM-350


Driveshaft and pins: Hardened stainless steel


Bonnet/gate seals: Viton® elastomer




Bakeout Temperature

without solenoid


Elastomer sealed bonnet: 150°C


Actuator: 60°C




Mounting Position

Any




Cycles Until Service

1,000,000 cycles


dependent on process






Vacuum

Pressure Range: 1×10-9 mbar


Helium leak rate: <2x10-9 mbar l/s


Differential pressure closed: 1 bar in either direction


Maximum ? pressure before opening: < 30 mbar




Mechanism

Pneumatic air service: 80 psig


Solenoid: 4.3 Watts


(latching-type, Valve to remain in same position in the event of power loss)


- supplied voltage: 120V AC, 50/60 Hz


- optional voltages: 24, 200, 240 VAC, 50/60 Hz or 12, 24V DC


Position indicator, max: 115 VAC or 28 VDC, 20 mA




Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote.

If you need help finding a model number use the following link: 88200 Series Model Key Guide

Pneumatic with Elastomer Bonnet and Gate O-Ring(includes reed switch position indicators)

DN Model Number J (Bolted Body) K (Clamped Body)
mm inch
32 x 220 1.26 x 8.74 88212-0109RX_ 2D 3D Quote 2D 3D Quote
32 x 332 1.26 x 13.07 88212-0113RX_ 2D 3D Quote 2D 3D Quote
46 x 236 1.81 x 9.29 88212-0209RX_ 2D 3D Quote 2D 3D Quote
50 x 336 1.97 x 13.23 88212-0213RX_ 2D 3D Quote 2D 3D Quote

Options

  • Custom sizes
  • Alternate o-ring material
  • Alternate solenoid voltages
  • Microswitches for position indicators
  • Roughing ports
  • Low-particulate and rapid service versions

28200-Series-Stainless-Steel-Valve

28200 Series Description

The 28200 Series Direct Drive Rectangular Valves offer one of the smallest interior surface areas in the vacuum valve industry. In the open position, the seal plate O-ring is completely out of sight preventing any particulate or media flow to accumulate on the sealing surface. In the closed position the one piece solid block design prevents any material buildup on the back side of the valve mechanism dramatically reducing service and maintenance requirements. This valve is engineered to meet the mechanical interface and vacuum containment requirements of the industry. To meet the specific needs of modular integrated processing systems, the valves are designed to isolate vacuum pressure on either side of the gate. A narrow profile design, including both actuator and controller, allows tight mounting between central, load-lock, handling and process chambers.


Standard Technical Specifications




Materials

Valve body and gate: 304 stainless steel


Welded bellows shaft seal: AM-350


Driveshaft and pins: Hardened stainless steel


Bonnet/gate seals: Viton® elastomer




Bakeout Temperature

without solenoid


Elastomer sealed bonnet: 150°C


Actuator: 60°C




Mounting Position

Any




Cycles Until Service

1,000,000 cycles


dependent on process






Vacuum

Pressure Range: 1×10-9 mbar


Helium leak rate: <2x10-9 mbar l/s


Differential pressure closed: 1 bar in either direction


Maximum ? pressure before opening: < 30 mbar




Mechanism

Pneumatic air service: 80 psig


Solenoid: 4.3 Watts


(latching-type, Valve to remain in same position in the event of power loss)


- supplied voltage: 120V AC, 50/60 Hz


- optional voltages: 24, 200, 240 VAC, 50/60 Hz or 12, 24V DC


Position indicator, max: 115 VAC or 28 VDC, 20 mA




Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote.

If you need help finding a model number use the following link: 28200 Series Model Key Guide

Pneumatic with Elastomer Bonnet and Gate O-Ring (includes reed switch position indicators)

DN Model Number J (Bolted Body) K (Clamped Body)
mm inch
32 x 220 1.26 x 8.74 28212-0109RX_ 2D 3D Quote 2D 3D Quote
32 x 332 1.26 x 13.07 28212-0113RX_ 2D 3D Quote 2D 3D Quote
46 x 236 1.81 x 9.29 28212-0209RX_ 2D 3D Quote 2D 3D Quote
50 x 336 1.97 x 13.23 28212-0213RX_ 2D 3D Quote 2D 3D Quote

Options

  • Custom sizes
  • Alternate o-ring material
  • Alternate solenoid voltages
  • Microswitches for position indicators
  • Roughing ports
  • UHV version with copper bonnet