71000 Series Stainless Steel Harsh Process Gate Valves

Description

The 71000 Series HPV (Harsh Process Valves) are designed for the harshest of vacuum environments. In typical harsh applications like MOCVD, ALD, PECVD the valves are subject to aggressive chemicals and high temperatures. The byproducts can affect the operation of the wheels/bearings, linkages and can cause the valve to seize so our HPV addresses this issue with no moving parts and a bellows that stays isolated from the process. The valves feature a robust dual containment design for increased safety, sealed bellows isolated from process for less maintenance, easy in-situ cleaning and o-ring replacement for reduced downtime and an optional integrated soft pump feature for lower particles.


 

Extreme Durability – For your most demanding process applications

Increased Safety – Robust dual containment design

Maintenance Free – Sealed bellows isolated from process

Reduced Downtime – Easy in-situ cleaning and o-ring replacement

Improved Pump Performance – Pump overload protection/isolation

Lower Particles – Intergrated soft pump feature

Standard Technical Specifications




Materials

Valve body and gate: 304 stainless steel


Welded bellows shaft seal: AM-350


Bonnet / gate seals: FKM or FKKM/FFPM elastometer




Temperature

Body: 150°C


Actuator: 100°C




Mounting Position

Any




Cycles

Cycles until service: > 250,000 cycles


dependent on process






Vacuum

Pressure Range: 1×10-9 mbar


Helium leak rate: < 1x10-9 mbar l/s


Differential pressure closed: tested up to 7 bar in any direction


Differential pressure at opening: 1 bar




Mechanism

Manual: hand crank


Pneumatic air service: 55-80 psi


Solenoid: 120V AC, 24V DC 50/60 Hz


Position indicator, max: 115VAC or 28 VDC, 20mA




Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote.

If you need help finding a model number use the following link: 71000 Series Model Key Guide

Pneumatic with Elastomer Bonnet and Gate O-Ring(includes reed switch position indicator)

DN Model Number KF/ISO-F
3 (Bolted)
ISO-K
6 (Clamped)
CF-F*
0 or 4 (Conflat)
mm inch
50 2.00 71210-020_R 2D 3D Quote 2D 3D Quote
63 2.50 71210-025_R 2D 3D Quote 2D 3D Quote 2D 3D Quote
80 3.00 71210-030_R 2D 3D Quote 2D 3D Quote 2D 3D Quote
100 4.00 71210-040_R 2D 3D Quote 2D 3D Quote 2D 3D Quote
160 6.00 71210-060_R 2D 3D Quote 2D 3D Quote 2D 3D Quote

Flange Types

  • 0 = CF-F Port with UNF Thread (71210-0400R)
  • 3 = KF/ISO-F Bolted (71210-0403R)
  • 4 = CF-F Port with Metric thread (71210-0404R)
  • 6 = ISO-K Clamped (71210-0406R)


Manual with Elastomer Bonnet and Gate O-Rings(includes visual position indicator)

DN Model Number KF/ISO-F
3 (Bolted)
ISO-K
6 (Clamped)
CF-F*
0 or 4 (Conflat)
mm inch
50 2.00 71110-020_V 2D 3D Quote 2D 3D Quote
63 2.50 71110-025_V 2D 3D Quote 2D 3D Quote 2D 3D Quote
80 3.00 71110-030_V 2D 3D Quote 2D 3D Quote 2D 3D Quote
100 4.00 71110-040_V 2D 3D Quote 2D 3D Quote 2D 3D Quote
160 6.00 71110-060_V 2D 3D Quote 2D 3D Quote 2D 3D Quote

Flange Types

  • 0 = CF-F Port with UNF Thread (71210-0400R)
  • 3 = KF/ISO-F Bolted (71210-0403R)
  • 4 = CF-F Port with Metric thread (71210-0404R)
  • 6 = ISO-K Clamped (71210-0406R)