21700 Series Stainless Steel 3-Position Gate Valves

Description

The 3-Position Gate Valves are designed for use in etching, CVD and any other process that requires pressure control. When used in conjunction with upstream mass flow controllers, this series valve will contribute to an exceptional pressure control capability. These valves may also be utilized to smooth the transition from rough to high vacuum. The valves employ two pneumatic solenoids and an air pressure regulator to achieve the three positions of fully open, fully closed, and an adjustable third position. One solenoid controls the fully open and fully closed positions while a second solenoid controls the third position.


Standard Technical Specifications




Materials

Valve body and gate: 304 stainless steel


Welded bellows shaft seal: AM-350


Drive shaft and pin: Hardened stainless steel




Vacuum

Pressure Range: 1×10-9 mbar


Helium leak rate: <2×10-9 mbar l/s


Differential pressure closed: 1 bar in either direction


Maximum Δ pressure before opening: < 30 mbar




Mechanism

Pneumatic air service: 80 psig


Solenoid: 4.0 Watts


- supplied voltage: 120V AC, 50/60 Hz


- optional voltages: 24, 200, 240 VAC, 50/60 Hz


Position indicator, max


- Reed switch for open & closed: 115 VAC or 28 VDC, 20 mA


- Microswitch for third position: 115 VAC, 5 A


- optional voltages: 250 VA, 5 A or 28 VDC, 5 A resistive load 28 VDC, 3 A inductive load




Cycles

1,000,000 cycles


Cycles until service: dependent on process






Bonnet/gate seals

HV: Viton® elastomer


Helium leak rate: <2×10-9 mbar l/s


Differential pressure closed: 1 bar




Temperature

Body: 150°C


Actuator: 60°C




Mounting Position

Any




Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote.

If you need help finding a model number use the following link: 21700 Series Model Key Guide

3-Position (includes elastomer seals with 120V AC solenoid and position indicators)

DN Model Number KF/ISO-F
3 (Bolted)
ISO-K
6 (Clamped)
CF-F*
0 or 4 (Conflat)
mm inch
100 4.00 21712-040_R 2D 3D Quote 2D 3D Quote 2D 3D Quote
160 6.00 21712-060_R 2D 3D Quote 2D 3D Quote 2D 3D Quote
200 8.00 21712-080_R 2D 3D Quote 2D 3D Quote 2D 3D Quote
250 10.00 21712-100_R 2D 3D Quote 2D 3D Quote
320 12.00 21712-120_R 2D 3D Quote 2D 3D Quote

Flange Types

  • 0 = CF-F Port with UNF Thread (21712-0400R)
  • 3 = KF/ISO-F Bolted (21712-0403R)
  • 4 = CF-F Port with Metric Thread (21712-0404R)
  • 6 = ISO-K Clamped (21712-0406R)

Options

  • JIS, ASA and Custom flanges
  • Alternate o-ring material
  • Alternate solenoid voltages
  • UHV copper bonnet version
  • Roughing ports