21200 Series Stainless Steel Million Cycle Gate Valves

Description

The 21200 Series Million Cycle Gate Valves are designed for high vacuum applications specifically when pressure ranges approximate 1 x 10-9 mbar and bakeout temperatures do not exceed 150°C. There are no mechanical locks inside vacuum, which is extremely beneficial for semiconductor and sensitive processes requiring vibration-free operation. All moving joints have hardened shafts, reducing particulate generation and providing smoother actuation. These valves provide valving for cryopumps, turbo pumps, ion pumps and other applications requiring clean, high cycle, low outgassing valves.


Standard Technical Specifications




Materials

Valve body and gate: 304 stainless steel


Welded bellows shaft seal: AM-350


Driveshaft and pins: Hardened stainless steel


Bonnet/gate seals: Viton® elastomer




Bakeout Temperature

without solenoid


Elastomer sealed bonnet: 150°C


Actuator: 60°C




Mounting Position

Any




Cycles Until Service

1,000,000 cycles


dependent on process






Vacuum

Pressure Range: 1×10-9 mbar


Helium leak rate: <2×10-9 mbar l/s


Differential pressure closed: 1 bar in either direction


Maximum Δ pressure before opening: ≤30 mbar




Mechanism

Manual: hand crank


Pneumatic air service: 80 psig


Solenoid: 4.0 Watts


- supplied voltage: 120V AC, 50/60 Hz


- optional voltages: 24, 200, 240 VAC, 50/60 Hz or 12, 24V DC


Position indicator, max: 115 VAC or 28 VDC, 20 mA




Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote.

If you need help finding a model number use the following link: 21200 Series Model Key Guide

Pneumatic with Elastomer Bonnet and Gate O-Rings (includes reed switch position indicators)

DN Model Number KF/ISO-F
3 (Bolted)
ISO-K
6 (Clamped)
CF-F*
0 or 4 (Conflat)
mm inch
16 0.625 21212-006_ 2D 3D Quote 2D 3D Quote
40 1.50 21212-015_R 2D 3D Quote 2D 3D Quote
50 2.00 21212-020_R 2D 3D Quote 2D 3D Quote
63 2.50 21212-025_R 2D 3D Quote 2D 3D Quote 2D 3D Quote
80 3.00 21212-030_R 2D 3D Quote 2D 3D Quote 2D 3D Quote
100 4.00 21212-040_R 2D 3D Quote 2D 3D Quote 2D 3D Quote
160 6.00 21212-060_R 2D 3D Quote 2D 3D Quote 2D 3D Quote
200 8.00 21212-080_R 2D 3D Quote 2D 3D Quote 2D 3D Quote
250 10.00 21212-100_R 2D 3D Quote 2D 3D Quote
320 12.00 21212-120_R 2D 3D Quote 2D 3D Quote

Flange Types

  • 0 = CF-F Port with UNF Thread (21212-0400R)
  • 3 = KF/ISO-F Bolted (21212-0403R)
  • 4 = CF-F Port with Metric Thread (21212-0404R)
  • 6 = ISO-K Clamped (21212-0406R)

Options

  • Custom flanges
  • UHV version with copper bonnet
  • Alternate o-ring material
  • Alternate solenoid voltages
  • Microswitches for position indicators
  • Roughing ports
  • Motor operator
  • High temperature components including o-rings, microswitches and actuator.
  • Larger Sizes