Description

The 88200 Series Direct Drive Rectangular Valves offer one of the smallest interior surface areas in the vacuum valve industry. In the open position, the seal plate O-ring is completely out of sight preventing any particulate or media flow to accumulate on the sealing surface. In the closed position the one piece solid block design prevents any material buildup on the back side of the valve mechanism dramatically reducing service and maintenance requirements. This valve is engineered to meet the mechanical interface and vacuum containment requirements of the industry. To meet the specific needs of modular integrated processing systems, the valves are designed to isolate vacuum pressure on either side of the gate. A narrow profile design, including both actuator and controller, allows tight mounting between central, load-lock, handling and process chambers.

88200 Series Catalog

Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote.

If you need help finding a model number use the following link: 88200 Series Model Key Guide

Pneumatic with Elastomer Bonnet and Gate O-Ring
(includes reed switch position indicators)

DN		Model
mm	inch	Number	J (Bolted Body)			K (Clamped Body)
32 x 220	1.26 x 8.74	88212-0109RX_	2D	3D	Quote	2D	3D	Quote
32 x 332	1.26 x 13.07	88212-0113RX_	2D	3D	Quote	2D	3D	Quote
46 x 236	1.81 x 9.29	88212-0209RX_	2D	3D	Quote	2D	3D	Quote
50 x 336	1.97 x 13.23	88212-0213RX_	2D	3D	Quote	2D	3D	Quote

Options
Custom sizes
Alternate o-ring material
Alternate solenoid voltages
Microswitches for position indicators
Roughing ports
Low-particulate and rapid service versions

88200 Series Aluminum Rectangular/Slit Valve

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Description