Description
The 71000 Series HPV (Harsh Process Valves) are designed for the harshest of vacuum environments. In typical harsh applications like MOCVC, ALD, PECVD the valves are subject to aggressive chemicals and high temperatures. The byproducts can affect the operation of the wheels/bearings, linkages and can cause the valve to seize so our HPV addresses this issue with no moving parts and a bellows that stays isolated from the process. The valves feature a robust dual containment design for increased safety, sealed bellows isolated from process for less maintenance, easy in-situ cleaning and o-ring replacement for reduced downtime and an optional integrated soft pump feature for lower particles.
Extreme Durability - For your most demanding process applications
Increased Safety - Robust dual containment design
Maintenance Free - Sealed bellows isolated from process
Reduced Downtime - Easy in-situation cleaning and o-ring replacement
Improved Pump Performance - Pump overload protection/isolation
Lower Particles - Intergrated soft pump feature
Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote.
If you need help finding a model number use the following link: 71000 Series Model Key Guide
| Pneumatic
with Elastomer Bonnet and Gate O-Ring (includes reed switch position indicator) |
|||||||||||||
| DN | Model | KF/ISO-F | ISO-K | CF-F* | |||||||||
| mm | inch | Number | 3 (Bolted) | 6 (Clamped) | 0 or 4 (Conflat) | ||||||||
| 50 | 2.00 | 71210-020_R | 2D | 3D | Quote | - | 2D | 3D | Quote | ||||
| 63 | 2.50 | 71210-025_R | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote | ||
| 80 | 3.00 | 71210-030_R | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote | ||
| 100 | 4.00 | 71210-040_R | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote | ||
| 160 | 6.00 | 71210-060_R | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote | ||
Flange Types 0 = CF-F Port with UNF Thread (71210-0400R) 3 = KF/ISO-F Bolted (71210-0403R) 4 = CF-F Port with Metric thread (71210-0404R) 6 = ISO-K Clamped (71210-0406R) |
|||||||||||||
| Manual with Elastomer Bonnet and
Gate O-Rings (includes visual position indicator) |
|||||||||||||
| DN | Model | KF/ISO-F | ISO-K | CF-F* | |||||||||
| mm | inch | Number | 3 (Bolted) | 6 (Clamped) | 0 or 4 (Conflat) | ||||||||
| 50 | 2.00 | 71110-020_V | 2D | 3D | Quote | - | 2D | 3D | Quote | ||||
| 63 | 2.50 | 71110-025_V | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote | ||
| 80 | 3.00 | 71110-030_V | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote | ||
| 100 | 4.00 | 71110-040_V | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote | ||
| 160 | 6.00 | 71110-060_V | 2D | 3D | Quote | 2D | 3D | Quote | 2D | 3D | Quote | ||
Flange Types 0 = CF-F Port with UNF Thread (71210-0400R) 3 = KF/ISO-F Bolted (71210-0403R) 4 = CF-F Port with Metric thread (71210-0404R) 6 = ISO-K Clamped (71210-0406R) |
|||||||||||||
© 2011 HVA LLC 12880 Moya Blvd Reno NV 89506-2611 Tel: 775.359.4442 Toll Free: 800.551.4422 Fax: 775.359.1369 Email: sales@highvac.com
| 
|
|
|
cms | search admin |
Stats