Description

The 3-Position Gate Valves are designed for use in etching, CVD and any other process that requires pressure control. When used in conjunction with upstream mass flow controllers, this series valve will contribute to an exceptional pressure control capability. These valves may also be utilized to smooth the transition from rough to high vacuum. The valves employ two pneumatic solenoids and an air pressure regulator to achieve the three positions of fully open, fully closed, and an adjustable third position. One solenoid controls the fully open and fully closed positions while a second solenoid controls the third position.

21700 Series Catalog

Use the table below to obtain 2D drawings (PDF) and 3D drawings (STP), or to request a quote.

If you need help finding a model number use the following link: 21700 Series Model Key Guide

3-Position (includes elastomer seals with 120V AC
solenoid and position indicators)

DN		Model	KF/ISO-F			ISO-K			CF-F*
mm	inch	Number	3 (Bolted)			6 (Clamped)			0 or 4 (Conflat)
100	4.00	21712-040_R	2D	3D	Quote	2D	3D	Quote	2D	3D	Quote
160	6.00	21712-060_R	2D	3D	Quote	2D	3D	Quote	2D	3D	Quote
200	8.00	21712-080_R	2D	3D	Quote	2D	3D	Quote	2D	3D	Quote
250	10.00	21712-100_R	2D	3D	Quote	-			2D	3D	Quote
320	12.00	21712-120_R	2D	3D	Quote	-			2D	3D	Quote

Options
JIS, ASA and Custom flanges
Alternate o-ring material
Alternate solenoid voltages
UHV copper bonnet version
Roughing ports

Flange Types

0 = CF-F Port with UNF Thread (21712-0400R)

3 = KF/ISO-F Bolted (21712-0403R)

4 = CF-F Port with UNF Thread (21712-0404R)

6 = ISO-K Clamped (21712-0406R)

21700 Series 3-Position Gate Valve

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Description