28200 Series Half Profile Rectangular Valve

Application The 28200 Series Valve /Interface incorporates a Direct Drive Gate. The Valves have been tested for 1,000,000+ cycles with no failures. The HVA valves are designed to isolate vacuum pressure on either side of the gate. They can be used singly or in pairs to provide appropriate pass through or seal for any part of the system. A narrow profile design, including both actuator and controller, allows tight mounting between central, load-lock, handling and process chambers. Download Specs for more detailed information Product Features • Virtually no particulate generation • No vibration, smooth actuation • Standard or custom flange options • One million plus cycles before servicing-application dependent • Furnace brazed The body and internal components are vacuum furnace brazed at 1100°C ensuring maximum joint integrity