21700 Series 3 Position Gate Valve

Application The 21700 Series Pneumatic 3-Position Gate Valves are designed for use in etching, CVD and any other process that requires pressure control. When used in conjunction with upstream mass flow controllers, this series valve will contribute to an exceptional pressure control capability. Valve positions are fully open, fully closed and any set third position. These valves may also be utilized to smooth the transition from rough to high vacuum. Download Specs for more detailed information Product Features • Mechanically preset, remote-controlled intermediate position • Position indicators for all three positions • Standard or custom flange options • One million plus cycles before servicing (application dependent) • Furnace brazed The body and internal components are vacuum furnace brazed at 1100°C ensuring maximum joint integrity