13000 Series Laminar Flow Valve

Application The Laminar Flow 13000 Series Gate Valves feature a laminar flow port orifice that effectively seals the valve mechanism from the gas stream. Two discrete carriage positions provide either 100% conductance (fully open) or 0% conductance (fully closed). In the open position, a flow orifice isolates all internal parts from the flow path. This orifice provides a clean, unbroken flow path through the valve while eliminating contact of the process gas with any of the valve mechanisms. Laminar Flow valves may be used in etching, CVD and any other process that uses highly corrosive gases which may be damaging to other valves. Download Specs for more detailed information Product Features • Electropneumatic actuation • Stainless steel welded bellows • Standard or custom flange options • Solenoid valve control with manual override • Furnace brazed The body and internal components are vacuum furnace brazed at 1100°C ensuring maximum joint integrity